MEMS Torsional Piezoelectric Micromachined Transcducer (PMUT)
Piezoelectric micro-machined ultrasonic transducers (pMUTs) have seen a strong increase in demand in the recent decade because of the maturity of their technology. Their ubiquitous applications range from low power distance measurement to simulated haptic feedback in virtual reality (VR) systems using arrays of pMUTs. These arrays traditionally use electronic beamforming to create a desired signal. This beamforming technique, however, couples beam focusing and beam steering, which may limit the quality of the produced signal. This work attempts to mitigate this by adding an extra degree of freedom to a single pMUT through a torsional comb drive design. The design can rotate the pMUT through 1◦ − 3◦ at around 20V . A modal analysis is also performed to compute the resonant modes of the design.
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Resonant Mode 1
